[labnetwork] Large-scale Nanopatterning

[Christian Spoerl]

Dear Long,

there is Sub-Wavelength Holographic Lithography as a lower cost solution 
for such structure sizes.
Have a look at apholo.ch they are doing this.

Best regards
Christian

Christian Spoerl
Managing Director
  
    
idonus sàrl
Rouges-Terres 61
2068 Hauterive / Neuchâtel
Switzerland
tel: +41 32 724 44 40
email:christian.spoerl at idonus.com
www.idonus.com

On 04.03.2022 22:33, Chang, Long wrote:
> Hello,
>
> I need to print 300nm dots with center to center spacing of 500nm on a 
> hexagonal lattice. Currently doing it with EBL, but need to do it 
> faster and cheaper. What are my options? Can this be done with a 
> Stepper somewhere?
>
> Thanks,
> Long
>
>
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