[labnetwork] Large-scale Nanopatterning

[Chang, Long]

Hello Everyone,

I appreciate the quick responses. The recommendations is either interference lithography or ASML stepper. The stepper is most suitable for this project so I’ll be reaching out to individuals to learn more.

Thanks,
Long

On Mar 4, 2022, at 3:33 PM, Chang, Long <lvchang at Central.UH.EDU<mailto:lvchang at Central.UH.EDU>> wrote:

Hello,

I need to print 300nm dots with center to center spacing of 500nm on a hexagonal lattice. Currently doing it with EBL, but need to do it faster and cheaper. What are my options? Can this be done with a Stepper somewhere?

Thanks,
Long

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