[labnetwork] UV light bulbs for mask aligner

Howard Northfield Howard.Northfield at uottawa.ca
Wed Mar 30 18:20:10 EDT 2022



I get mine from Advance Radiation Corporation (ARC). Check out:

http://www.arc-lamps.com/mercury_lamps.html

http://www.arc-lamps.com/pdf/Deep-UV-short-Arc-Lamps-For-Photolith.pdf
Deep UV Short Arc Lamps for Photolith - Gas Discharge Lamp Manufacturer, Mercury Lamp Manufacturer<http://www.arc-lamps.com/pdf/Deep-UV-short-Arc-Lamps-For-Photolith.pdf>
electrical specifications oper voltage (volts) 31-37 31-37 35.41 31-37 32-38 22-28 31.37 current (nom.) 20.0 model duv-350 duv.ioco duv-20co dijv.5c030036
www.arc-lamps.com

Howard Northfield
Research Associate
Center for Research in Photonics
University of Ottawa
25 Templeton Street,
Ottawa, Ontario
Canada, K1N 6N5
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Nava Ariel-Sternberg <na2661 at columbia.edu>
Sent: Wednesday, March 30, 2022 1:47 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] UV light bulbs for mask aligner

Attention : courriel externe | external email

Hi all,

After 6 months of waiting for Atlanta light bulbs (both 350W and 1000W) we are forced to look for alternative vendors.

If you have any recommended vendors with a reasonable lead time on UV bulbs for mask aligners please share your secret.

Thanks,

Nava



Dr. Nava Ariel-Sternberg

Senior Director of CNI Labs

Columbia University

CEPSR/MC 8903

530 west 120th st. NY

NY 10027

Office: 212-8549927

Cell: 201-5627600




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