[labnetwork] BCL3 question

[Morrison, Richard H., Jr]

HI everyone,



Does anybody have an estimate on how long BCl3 last in a cylinder. I have a cylinder of BCL3 install in 2013 and recently the etch rate has dropped, does BCl3 go bad? The gas cabinet scale is not in alarm.



Rick





Richard Morrison

PMTS

Draper Laboratory

555 Technology Square

Cambridge Ma  02139

Office: 617-258-3420

Cell: 508-930-3461



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