[labnetwork] BCL3 question

[Tom Britton]

Hi Richard,

I got this a while back from I believe Air Liquide, but I'm not 100% positive of the source. Hopefully it helps.

Happy Holidays,

Tom

Tom Britton
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Morrison, Richard H., Jr
Sent: Wednesday, November 30, 2022 7:53 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] BCL3 question

HI everyone,

Does anybody have an estimate on how long BCl3 last in a cylinder. I have a cylinder of BCL3 install in 2013 and recently the etch rate has dropped, does BCl3 go bad? The gas cabinet scale is not in alarm.

Rick


Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461

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