[labnetwork] MA6 mask aligner lamp housing removal

[Robert Vandusen]

Thanks Ana.
We have an older MA6 with a fixed lamp housing.
We determined that the entire lamp housing would have to slide off the system to the right to get access to our cooling fans.
This would be a fairly difficult task.
We managed to get the fan blade re-attached to the existing motor and it is working for now.

Thanks for the contact information.
Best regards
Rob
Robert Vandusen
Technical Officer, Microfabrication Lab
Electronics Department
Carleton University
room: 4184 Mackenzie Building
613-520-2600 ext 5761
Robert_vandusen at cunet.carleton.ca



-----Original Message-----
From: Cohen, Ana N CTR USARMY DEVCOM ARL (USA) <ana.n.cohen.ctr at army.mil> 
Sent: October 6, 2022 1:31 PM
To: labnetwork at mtl.mit.edu; Robert Vandusen <RobertVandusen at cunet.carleton.ca>
Subject: Re: [labnetwork] MA6 mask aligner lamp housing removal


Hi Robert,

What generation is this? My Gen3 can slide the lamp back during the
initialization stage (it needs to be in the back position for the BA mode).
Alternatively I can manually press down on the spring holding it in
position, but that's less desirable. For access to electrical connections
everything typically requires removing a panel to actually access that area.

If you're looking for further MA6 support, it might be worth contacting Mark
Anderson (he's located in Vermont).

Kindly,
Ana

--
Ana N. Cohen [she/her/hers]
Photolithography Cleanroom Technician
General Technical Services, LLC | US Army Research Laboratory
2800 Powder Mill Road, Adelphi, MD 20783
Tel: 301-394-1527 | Email: ana.n.cohen.ctr at army.mil