[labnetwork] Cambridge Nanotech Fiji ALD precursor pressures

[Bradash, Mihailo Rayko]

Hello,

I was wondering if anyone here has had any experience with monitoring the precursor gas pressures in a Cambridge Nanotech Fiji ALD? I am using 4021Hafnium> Tetrakis(dimethylamino)hafnium, 98+%, contained in 50 ml Swagelok(r) cylinder and want to know if anyone happen to have a base pressure supplied by the cylinder, and what pressures have you seen before failing/empty? I recently came into this tool and position middle of this year and do not have enough data to for a trend analysis.

Mihailo Bradash
Research Engineer
Purdue University
Birck Nanotechnology Center
1205 W. State Street
West Lafayette, Indiana 47907
Office: (765)494-6522
Cell: (219)670-4974
mbradash at purdue.edu<mailto:mbradash at purdue.edu>

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