[labnetwork] Cambridge Nanotech Fiji ALD precursor pressures

[James Mitchell]

The best way to know if the precursor is empty is to weigh it.
Should have a tare weight on it. Another way is to look for a spike in
pressure during the pulse step.
This only works if you are not flowing too much gas.

Jim

On Tue, Oct 11, 2022 at 7:36 PM Bradash, Mihailo Rayko <mbradash at purdue.edu>
wrote:

> Hello,
>
>
>
> I was wondering if anyone here has had any experience with monitoring the
> precursor gas pressures in a Cambridge Nanotech Fiji ALD? I am using
> 4021Hafnium> Tetrakis(dimethylamino)hafnium, 98+%, contained in 50 ml
> Swagelok® cylinder and want to know if anyone happen to have a base
> pressure supplied by the cylinder, and what pressures have you seen before
> failing/empty? I recently came into this tool and position middle of this
> year and do not have enough data to for a trend analysis.
>
>
>
> Mihailo Bradash
>
> Research Engineer
>
> Purdue University
>
> Birck Nanotechnology Center
>
> 1205 W. State Street
>
> West Lafayette, Indiana 47907
>
> Office: (765)494-6522
>
> Cell: (219)670-4974
>
> mbradash at purdue.edu
>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>


-- 
*Thank you, Jim*

*James Mitchell*
*Specialty Trades Technician*
*Dept. of Electrical and Computer Engineering*
*North Carolina State University Nanofabrication Facility (NNF)*
*MRC RM243A **Box 7911*
*2410 Campus Shore Dr., Raleigh, NC 27606*
*jtmitch5 at ncsu.edu* <jtmitch5 at ncsu.edu>
*Desk: 919-515-5394*
*Cell: 919-717-7325*
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20221012/4eb594bd/attachment.html>