[labnetwork] Cambridge Nanotech Fiji ALD precursor pressures

[James Grant]

Hello all,

Agree with James Mitchell.

Best way to is remove bottle and weigh it.

Only other way to know if bottle is getting empty is to use residual gas analyzer to analyse chemical fingerprint in ALD chamber.  Not seen it in practice. Also good for process development to know how long you need to purge precursor/plasma/water.

We normally find out our precursor is empty by using ellipsometer to measure film thickness and finding out it is almost < 1 nm!

Cheers,

James

Dr. James Paul Grant
Research Engineer in Plasma Processing

Plasma Etch Group
 james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk>

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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of James Mitchell
Sent: 12 October 2022 12:23
To: Bradash, Mihailo Rayko <mbradash at purdue.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Cambridge Nanotech Fiji ALD precursor pressures

The best way to know if the precursor is empty is to weigh it.
Should have a tare weight on it. Another way is to look for a spike in pressure during the pulse step.
This only works if you are not flowing too much gas.

Jim

On Tue, Oct 11, 2022 at 7:36 PM Bradash, Mihailo Rayko <mbradash at purdue.edu<mailto:mbradash at purdue.edu>> wrote:
Hello,

I was wondering if anyone here has had any experience with monitoring the precursor gas pressures in a Cambridge Nanotech Fiji ALD? I am using 4021Hafnium> Tetrakis(dimethylamino)hafnium, 98+%, contained in 50 ml Swagelok® cylinder and want to know if anyone happen to have a base pressure supplied by the cylinder, and what pressures have you seen before failing/empty? I recently came into this tool and position middle of this year and do not have enough data to for a trend analysis.

Mihailo Bradash
Research Engineer
Purdue University
Birck Nanotechnology Center
1205 W. State Street
West Lafayette, Indiana 47907
Office: (765)494-6522
Cell: (219)670-4974
mbradash at purdue.edu<mailto:mbradash at purdue.edu>

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--
Thank you, Jim

James Mitchell
Specialty Trades Technician
Dept. of Electrical and Computer Engineering
North Carolina State University Nanofabrication Facility (NNF)
MRC RM243A Box 7911
2410 Campus Shore Dr., Raleigh, NC 27606
jtmitch5 at ncsu.edu<mailto:jtmitch5 at ncsu.edu>
Desk: 919-515-5394
Cell: 919-717-7325

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