[labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate

[Matthew Moneck]

Hi Tucson,

We have a PVD75 system with the Torus Magkeeper guns.  We run targets with
and without a backing plate depending on the material.  That said, all of
the targets have a magnetic keeper either mounted to the backing plate or
to the back of the target.  The advantage of running without a backing
plate is that you can go to higher power if needed.  For Ti, we prefer to
run the target without a backing plate, so in that case, the magnetic
keeper is mounted directly to the back of the target.  We have not
attempted to run any targets without a keeper, and I would be hesitant to
do so, as the keeper helps to ensure the target is centered and sitting in
good electrical and thermal contact with the copper cooling surface.  If
you are running a confocal arrangement with angled cathodes, I would also
be concerned that actuation of the shutter would create enough vibration to
move the target in the absence of a keeper.

Best Regards,

Matt

On Tue, Aug 15, 2023 at 3:44 PM Richelson, Tucson <tucsonr at illinois.edu>
wrote:

> Hello all,
>
>
>
> I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers.
> I have a student that would like to sputter Ti. I have a Ti target, but it
> doesn’t have a backing. All of my other targets have backings. It seems
> logical that if I want to use a target on a gun with a MagKeeper I would
> need a backing (pictured is my Al target with a backing).
>
>
>
> I asked our Lesker sales rep and his response was to use the Ti target
> without the backing. I asked if the target will slide off of the gun. His
> response was no.
>
>
>
> Does this make sense? Does anyone have experience with sputtering Ti in a
> Lesker tool?
>
>
>
>
>
>
>
>
>
> *Best,*
>
> *Tucson Richelson*
>
> -------------------------------------------------------------------------
>
> *Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)*
>
> *University of Illinois*
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>
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>
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-- 

--
Matthew T. Moneck, Ph.D
Executive Director, Claire & John Bertucci Nanotechnology Laboratory
Electrical & Computer Engineering | Carnegie Mellon University
5000 Forbes Avenue, Pittsburgh, PA 15213-3890
Phone: 412-268-5430
ece.cmu.edu
nanofab.ece.cmu.edu
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