[labnetwork] Ebara Pump Setup

[Dennis Schweiger]

Bill,

On the Ebara A70's we use, there is a delay that is vacuum related between
the start of the mechanical pump, before the blower fires up.  Is it
possible that this is your issue?

Dennis

734.647.2055 Ofc

On Fri, Aug 18, 2023 at 12:21 PM William Kiether <wjkiethe at ncsu.edu> wrote:

> Hello,
>
> We are trying to test some Ebara dry pump/blower combos that we got from a
> tool donation and are having problems with the setup. The pumps are
> EST200WN models with both a pump and a blower, but the controllers are only
> recognizing them as EST10N, which are smaller units w/o the blower option.
> When powered up, only the pump will turn on. This occurs whether we are
> using the Ebara controller or the remote option with jumpers. The power is
> 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody
> encountered this problem? The Ebara documentation has not been helpful for
> this issue.
>
> Bill Kiether
> NCSU Nanofabrication Facility
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20230818/8b3c5ff8/attachment.html>