[labnetwork] Ebara Pump Setup

William Kiether wjkiethe at ncsu.edu
Fri Aug 18 13:26:36 EDT 2023


No, we are aware of the 30 second delay, and have let it go for up to 10
minutes - we also haven’t detected any voltage being sent to the blowers

Bill

On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger <schweig at umich.edu> wrote:

> Bill,
>
> On the Ebara A70's we use, there is a delay that is vacuum related between
> the start of the mechanical pump, before the blower fires up.  Is it
> possible that this is your issue?
>
> Dennis
>
> 734.647.2055 Ofc
>
> On Fri, Aug 18, 2023 at 12:21 PM William Kiether <wjkiethe at ncsu.edu>
> wrote:
>
>> Hello,
>>
>> We are trying to test some Ebara dry pump/blower combos that we got from
>> a tool donation and are having problems with the setup. The pumps are
>> EST200WN models with both a pump and a blower, but the controllers are only
>> recognizing them as EST10N, which are smaller units w/o the blower option.
>> When powered up, only the pump will turn on. This occurs whether we are
>> using the Ebara controller or the remote option with jumpers. The power is
>> 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody
>> encountered this problem? The Ebara documentation has not been helpful for
>> this issue.
>>
>> Bill Kiether
>> NCSU Nanofabrication Facility
>>
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>
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