[labnetwork] Ebara Pump Setup

[Paolini, Steven]

Most mech pump/ blower packages use pressure as a signal for the blower to cut in. I would isolate the package by dead heading the pump and seeing if the blower kicks in. If so, you have an upstream vacuum leak that prevents the blower from triggering.

Equipment Dood

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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of William Kiether <wjkiethe at ncsu.edu>
Sent: Friday, August 18, 2023 1:26:36 PM
To: Dennis Schweiger <schweig at umich.edu>
Cc: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>; Philip Barletta <pbarlet at ncsu.edu>; Erik Vick <epvick2 at ncsu.edu>
Subject: Re: [labnetwork] Ebara Pump Setup

No, we are aware of the 30 second delay, and have let it go for up to 10 minutes - we also haven’t detected any voltage being sent to the blowers

Bill

On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger <schweig at umich.edu<mailto:schweig at umich.edu>> wrote:
Bill,

On the Ebara A70's we use, there is a delay that is vacuum related between the start of the mechanical pump, before the blower fires up.  Is it possible that this is your issue?

Dennis

734.647.2055 Ofc

On Fri, Aug 18, 2023 at 12:21 PM William Kiether <wjkiethe at ncsu.edu<mailto:wjkiethe at ncsu.edu>> wrote:
Hello,

We are trying to test some Ebara dry pump/blower combos that we got from a tool donation and are having problems with the setup. The pumps are EST200WN models with both a pump and a blower, but the controllers are only recognizing them as EST10N, which are smaller units w/o the blower option. When powered up, only the pump will turn on. This occurs whether we are using the Ebara controller or the remote option with jumpers. The power is 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody encountered this problem? The Ebara documentation has not been helpful for this issue.

Bill Kiether
NCSU Nanofabrication Facility
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