[labnetwork] Ebara Pump Setup

[Jim Mitchell]

Bill, some things to try. Check the phase connections for both pumps. Check
the vac switch for operation when pumping down. Look for a configuration
menu on the controller,  maybe it has a dead battery and is defaulting. We
have some of these, I'll look for a manual.

Jim

On Sat, Aug 19, 2023, 7:47 AM William Kiether <wjkiethe at ncsu.edu> wrote:

> I am dead heading the package, it gets to 450 mTorr - still no blower
>
>
> On Fri, Aug 18, 2023 at 6:54 PM Paolini, Steven <
> spaolini at cns.fas.harvard.edu> wrote:
>
>> Most mech pump/ blower packages use pressure as a signal for the blower
>> to cut in. I would isolate the package by dead heading the pump and seeing
>> if the blower kicks in. If so, you have an upstream vacuum leak that
>> prevents the blower from triggering.
>>
>> Equipment Dood
>>
>> Get Outlook for iOS <https://aka.ms/o0ukef>
>> ------------------------------
>> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of William
>> Kiether <wjkiethe at ncsu.edu>
>> *Sent:* Friday, August 18, 2023 1:26:36 PM
>> *To:* Dennis Schweiger <schweig at umich.edu>
>> *Cc:* Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>;
>> Philip Barletta <pbarlet at ncsu.edu>; Erik Vick <epvick2 at ncsu.edu>
>> *Subject:* Re: [labnetwork] Ebara Pump Setup
>>
>> No, we are aware of the 30 second delay, and have let it go for up to 10
>> minutes - we also haven’t detected any voltage being sent to the blowers
>>
>> Bill
>>
>> On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger <schweig at umich.edu>
>> wrote:
>>
>> Bill,
>>
>> On the Ebara A70's we use, there is a delay that is vacuum related
>> between the start of the mechanical pump, before the blower fires up.  Is
>> it possible that this is your issue?
>>
>> Dennis
>>
>> 734.647.2055 Ofc
>>
>> On Fri, Aug 18, 2023 at 12:21 PM William Kiether <wjkiethe at ncsu.edu>
>> wrote:
>>
>> Hello,
>>
>> We are trying to test some Ebara dry pump/blower combos that we got from
>> a tool donation and are having problems with the setup. The pumps are
>> EST200WN models with both a pump and a blower, but the controllers are only
>> recognizing them as EST10N, which are smaller units w/o the blower option.
>> When powered up, only the pump will turn on. This occurs whether we are
>> using the Ebara controller or the remote option with jumpers. The power is
>> 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody
>> encountered this problem? The Ebara documentation has not been helpful for
>> this issue.
>>
>> Bill Kiether
>> NCSU Nanofabrication Facility
>>
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