[labnetwork] Argon vs Krypton for sputtering

[Albert William Flounders]

 Robert,
Interesting question. I think it's driven by cost
Ar is almost 1% in air while all other noble gases are in the ppm range (Kr
~1ppm)
The ionization energy for Ar and Kr is similar (both much lower than Ne and
He)
so you get good ionization yield from Ar. I'm not sure that the sputter
yield gain of
Kr would be worth the significant additional cost.
I'm curious what other replies you receive.

Bill Flounders
UC Berkeley

On Thu, Aug 31, 2023 at 10:48 AM Macdonald, Robert (GE Aerospace, US) <
robert.macdonald at ge.com> wrote:

> Hi all,
>
>
>
> I’m wondering when folks use Krypton or other noble gasses for sputtering
> in their facilities, and why. I have read that ideally, one matches the
> atomic weight of the target with the gas. Thus, Neon for lighter targets,
> Krypton for heavier.
>
>
>
> In practice I see Ar used for all materials.
>
>
>
> Any thoughts or opinions would be of interest.
>
>
>
> Thanks,
>
>
>
> Rob
>
>
>
>
>
>
>
> Robert MacDonald
>
> MEMS Engineer
>
> GE Research
>
> 1 Research Circle
>
> Niskayuna, NY 12309
>
> 518 312-5646
>
> Robert.macdonald at ge.com
>
>
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