[labnetwork] [EXTERNAL] Argon vs Krypton for sputtering

[Morrison, Richard H., Jr]

HI,



At Draper we use Argon and Krypton. For sputtering on polymers we have found that Kr works better for the sputter clean and since it is larger atom it does not implant very far into the polymer and oxides.



Rick





From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Macdonald, Robert (GE Aerospace, US)
Sent: Thursday, August 31, 2023 12:50 PM
To: labnetwork at mtl.mit.edu
Subject: [EXTERNAL] [labnetwork] Argon vs Krypton for sputtering



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Hi all,



I'm wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier.



In practice I see Ar used for all materials.



Any thoughts or opinions would be of interest.



Thanks,



Rob







Robert MacDonald

MEMS Engineer

GE Research

1 Research Circle

Niskayuna, NY 12309

518 312-5646

Robert.macdonald at ge.com<mailto:Robert.macdonald at ge.com>



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