[labnetwork] Argon vs Krypton for sputtering

[Macdonald, Robert (GE Aerospace, US)]

Hi all,

I'm wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier.

In practice I see Ar used for all materials.

Any thoughts or opinions would be of interest.

Thanks,

Rob



Robert MacDonald
MEMS Engineer
GE Research
1 Research Circle
Niskayuna, NY 12309
518 312-5646
Robert.macdonald at ge.com

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