[labnetwork] Passivation of ALD chamber and pocket Si wafer

[Dilek Cakiroglu (Alumni)]

Hi,

I am dealing with contamination of the ALD chamber and also pocket Si
wafer. What is the best way to passivate the ALD chamber and also the Si
pocket wafer which has high levels of Na and K contamination?

Also, does anyone have any experience of the barrier properties of common
ALD dielectrics like Al2O3, SiO2, and HfO2 for e.g. Na, Cu, Sn, Zn, Fe, K?

Thank you,

Dilek
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