[labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller
Gila,Brent P
bgila at ufl.edu
Mon Dec 4 16:13:36 EST 2023
Hello Mike,
We had that issue several years ago and replace the PM-7 controller.
This was at a time when VAT was still supporting that unit (2014). You
may need to reach out to a 3rd party like ClassOne to see if they have a
PM-7 controller or are able to repair one.
Best Regards,
Brent
--
Brent P. Gila, PhD.
Associate Director, Research Service Centers
University of Florida
1041 Center Drive
Gainesville, Florida 32611
Tel:352-273-2245, Fax:352-846-2877
email: bgila at ufl.edu
On 12/4/2023 2:28 PM, Michael Call wrote:
> *[External Email]*
>
> We have recently had a failure of the VAT valve PM-7 controller on our
> STS DRIE. I've tried contacting SPTS, VAT and distributors for help.
> The CM gauge read back always reads 100mTorr(maximum) at the
> controller. I've measured and verified that the correct voltage
> to and from the CM gauge is correct. So, I have verified that the
> problem is the VAT PM-7 control box. Has anyone on the list had a
> similar issue with the controller? And is there someone still
> supporting the STS multiplex DRIE?
>
> Thank you
>
> --
> Mike Call
> CORE Facilities Manager
> University of Maine
> Coordinated Operating Research Entities Cleanroom/TASC
> ESRB Barrows Hall Room 294
> 207-581-3382
>
> image.png
>
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