[labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller

[Martin, Michael]

Hi Mike,
   We have a spare STS with a PM-7 we can part out if you are interested.  Just PM me if you want further info.

Regards,
   Michael

________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Michael Call <michael.call at maine.edu>
Sent: Monday, December 4, 2023 2:28 PM
To: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: [labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller


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We have recently had a failure of the VAT valve PM-7 controller on our STS DRIE.  I've tried contacting SPTS, VAT and distributors for help.  The CM gauge read back always reads 100mTorr(maximum) at the controller.  I've measured and verified that the correct voltage to and from the CM gauge is correct.  So, I have verified that the problem is the VAT PM-7 control box.  Has anyone on  the list had a similar issue with the controller?  And is there someone still supporting the STS multiplex DRIE?

Thank you

--
Mike Call
CORE Facilities Manager
University of Maine
Coordinated Operating Research Entities Cleanroom/TASC
ESRB Barrows Hall Room 294
207-581-3382
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