[labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller

[Michael Call]

We have recently had a failure of the VAT valve PM-7 controller on our STS
DRIE.  I've tried contacting SPTS, VAT and distributors for help.  The CM
gauge read back always reads 100mTorr(maximum) at the controller.  I've
measured and verified that the correct voltage to and from the CM gauge is
correct.  So, I have verified that the problem is the VAT PM-7 control
box.  Has anyone on  the list had a similar issue with the controller?  And
is there someone still supporting the STS multiplex DRIE?

Thank you

-- 
Mike Call
CORE Facilities Manager
University of Maine
Coordinated Operating Research Entities Cleanroom/TASC
ESRB Barrows Hall Room 294
207-581-3382

[image: image.png]
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20231204/4bdfb47a/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image.png
Type: image/png
Size: 53624 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20231204/4bdfb47a/attachment.png>