[labnetwork] Size GEN 2 ALD transfer recipe roadblock

[Hathaway, Malcolm R]

Hi Fabien,

So, a thing to remember is that ALD in its pure form is putting monolayers of reactant on a surface.  The monolayer formed is somewhat independent of vapor pressure, flow and other "cvd" variables, and often only mildly dependent on temperature, depending what the reactants are.

In sequential infiltration synthesis, you are depending on the diffusion of precursor into a substrate to change the substrate somehow.  As soon as you say "diffusion", now you have a process very much influenced by "cvd" variables such as partial pressure, total pressure, temperature, exposed area, flow variations, etc.  Thus, upscaling an ALD process for SIS purposes is a rather more complicated kettle of fish compared to upscaling a "typical" ALD process.

I assume you are using a bigger chamber to put more substrates in?  Or perhaps a larger individual substrate?  What do you reckon is the % change in substrate surface area and "infiltration volume" between old and new chamber?

What is the chemistry that you are using?

We can discuss this more off-line, if folks feel it is too much into the weeds for a general labnetwork discussion...



Mac Hathaway
ALD Process Engineer
Harvard CNS




________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Fabien Dauzou <fabien.dauzou at edgehogtech.com>
Sent: Monday, December 4, 2023 2:26 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Size GEN 2 ALD transfer recipe roadblock


Hello labnetwork,



We have an ALD chamber of approximately 0.2 m3 (0.6 x 0.6 x 0.6 m) and we have been transferring recipe from a much smaller chamber.

However, it is challenging to get a good sequential infiltration synthesis (SIS).

What have been the main roadblock when scaling up ALD chamber size to replicate recipe? Gas flow, pulse duration, pumping time, temperature?



Best regards, Bien cordialement,



Fabien Dauzou, Dipl. Ing.

Manager Processes at Edgehog

Photovoltaic Enthusiast | Cleantech Optimist

fabien.dauzou at edgehogtech.com<mailto:fabien.dauzou at edgehogtech.com>  |Mob: 438-868-1657 | https://www.edgehogtech.com/

https://www.linkedin.com/company/edgehog/

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