[labnetwork] Calibration for thermocouplers for Jipelec JetFirst300

[Hüseyin Yagci]

All of the comments make sense. Unfortunately, our tool (or previus usage on it) does not.

The TC calibration file is just empty. Full of quotation marks and no actual data. The process engineer that signed the tool off is not here anymore and we don't know if this list was supposed to be empty (as if, the values are hardcoded into the tool/board) or it was overwritten with an empty reading accidentally.

We are trying to get in touch with the supplier, but hasn't been fruitful so far.

Many thanks for your valuable suggestions.

Huseyin Bilge Yagci
Cardiff University





________________________________
From: Hosler, Richard S <hosler0 at purdue.edu>
Sent: 06 December 2023 15:19
To: Hüseyin Yagci <YagciH at cardiff.ac.uk>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: Calibration for thermocouplers for Jipelec JetFirst300

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I've had many struggles with our Jipelec Jetfirst 200C over the years, but most of the issues have to do with the pyrometer's reference table which is calibrated against the TC. I would check your TC calibration file to make sure that any corrections that may have been added to the previous TC aren't skewing the replacement's results. A decently stable TC probably won't have any adjustments at all in the table file. I also purchased a dry-block thermal calibrator to do some sanity checks on various thermocouples as well, up to at least 430C anyway.

We used to use the thin wire type PT018 TCs and those aren't made anymore in Jipelec's form factor. The newer ones are rigid, and while they last longer I feel that the response isn't as fast and they are more prone to contaminating the chamber during the higher temperatures when doing pyrometer re-calibration. The older PIMS software on my tool seems to be doing some weird linear interpolation on a decidedly non-linear response curve, and it's hard to get an accurate adjustment for the whole 500-1200C range.

Other problem spots that may be affecting your readings at higher temperatures would be contamination on your upper quartz window and material falling down the pyrometer well onto the BaF2 window above the sensor itself. The large window can be acid cleaned and the BaF2 window should just have the material gently removed.

Hope that helps.


Richard Hosler

Senior Research Engineer

Birck Nanotechnology Center | Room 2287C

Office:  765.494.4712 | Email: richhosler at purdue.edu<mailto:richhosler at purdue.edu>

Wiki:  https://wiki.itap.purdue.edu/display/BNCWiki

iLabs:  https://purdue.ilabsolutions.com/homepage/

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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Hüseyin Yagci <YagciH at cardiff.ac.uk>
Sent: Wednesday, December 6, 2023 7:53 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Calibration for thermocouplers for Jipelec JetFirst300

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Hello,
We have an ECM Jipelec JetFirst 300 RTA, capable of going to 1200C in our clean room. The system has a central thermocoupler (K-type TC) for calibration and readout, three peripheral read-only TCs and a pyrometer for high temperatures. The pyrometer reading is referenced to the central TC reading. Couple of weeks ago we noticed our contact performances varied across wafers and decided to change the central TC. The newly put TC reads up to 30C lower than the previous one, as well as all the peripheral TCs. The company does not seem to be checking the uniformity between the TCs they send, and we basically do not if the new TC is reading correctly or not. We are looking for a way to calibrate them in-house, without getting NPL involved. Did anybody encounter a similar problem before?

Many thanks,
Huseyin Bilge Yagci
Cardiff University
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