[labnetwork] Contract SiO2 Deposition on 300 mm Wafers

[Heidelberger, Christopher - 0889 - MITLL]

Hello,

 

Does anyone know of a business or other entity that does contract deposition
of SiO2 films on 300 mm wafers? I would like to have 50 nm SiO2 deposited by
PECVD on just two 300 mm Si wafers. It would need to be in a Au-free system.


 

Best,

Chris

 

-

Christopher Heidelberger, PhD
Technical Staff, Quantum Information and Integrated Nanosystems Group
MIT Lincoln Laboratory, 244 Wood Street, Lexington, MA 02421-6246
Phone: 781-981-9052 | Email: c.heidelberger at ll.mit.edu
<mailto:c.heidelberger at ll.mit.edu>  | he/him

 

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