[labnetwork] Question: adhesion of metal to BPDA/PPD polyimide
Beaudoin, Mario
beaudoin at physics.ubc.ca
Wed Feb 1 14:07:43 EST 2023
Dear Networkers,
I'm new to polyimide processing. We have a student project that
requires deposition of metal on polyimide (BPDA/PPD PI-2600 series from
HD microsystems). We tried liftoff with depositon of Ti/Pt by Ebeam.
Despite a 1min O2 plasma, albeit at low power, the metal was peeling
off. Moreover, the photoresist was also peeling off from the
polyimide. Does anyone have a good working recipe for metalization of
polyimide?
Thanks,
Mario
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