[labnetwork] third party companies for servicing PlasmaTherm DRIE systems

[Jing Guo]

Hi Fubo, 

I am not sure which email or contact you requested the quote. Usually the response time is longer from PlasmaTherm comparing to other vendors. We only have one PECVD system from them, so we don’t have a third party company for the service. 

David Harris is the business development manager for university and R&D. His email is David.harris at plasmatherm.com and his cell is #727-370-3947. It should be fine to directly call him. 
I have some other contacts from plasma-therm tech-support or hardware service. Depending on different requests, I usually will send message to all of them.
Please let me know whether you need other contacts information. 



Best,
Jing
---------------------------------------
Jing Guo Ph.D.
Research Scientist
SEA Cleanroom (SST 017)
Rice University
Houston, TX 
jeanne.guo at rice.edu
713-348-8227







> On Jan 26, 2023, at 3:45 PM, Football <yaofootball at gmail.com> wrote:
> 
> Dear all,
> 
> We are having trouble getting PlasmaTherm to respond to our questions and service quote. Wanted to ask if you know of any third party companies that work on PlasmaTherm systems, specifically their DRIE tool?
> 
> Thanks for any suggestions!
> 
> Fubo Rao, Ph.D.,
> Nanofabrication Cleanroom Manager,
> Center for Nanoscale Materials,
> Argonne National Laboratory
> 9700 S. Cass Ave, Lemont, IL 60439
> Phone: 630-252-5708
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