[labnetwork] third party companies for servicing PlasmaTherm DRIE systems

[Football]

Thank you all very much for providing the very helpful information!!

Thanks,



*Fubo Rao, Ph.D.,*



*Nanofabrication Cleanroom Manager,*

*Center for Nanoscale Materials,*

*Argonne National Laboratory*

*9700 S. Cass Ave, Lemont, IL 60439*

*Email: **frao at anl.gov* <frao at anl.gov>

*Phone: 630-252-5708*

On Mon, Feb 27, 2023 at 1:15 PM Jing Guo <jeanne.guo at rice.edu> wrote:

> Hi Fubo,
>
> I am not sure which email or contact you requested the quote. Usually the
> response time is longer from PlasmaTherm comparing to other vendors. We
> only have one PECVD system from them, so we don’t have a third party
> company for the service.
>
> David Harris is the business development manager for university and R&D.
> His email is David.harris at plasmatherm.com and his cell is #727-370-3947.
> It should be fine to directly call him.
> I have some other contacts from plasma-therm tech-support or hardware
> service. Depending on different requests, I usually will send message to
> all of them.
> Please let me know whether you need other contacts information.
>
>
>
> Best,
> Jing
> ---------------------------------------
> Jing Guo Ph.D.
> Research Scientist
> SEA Cleanroom (SST 017)
> Rice University
> Houston, TX
> jeanne.guo at rice.edu
> 713-348-8227
>
>
>
>
>
>
>
> On Jan 26, 2023, at 3:45 PM, Football <yaofootball at gmail.com> wrote:
>
> Dear all,
>
> We are having trouble getting PlasmaTherm to respond to our questions and
> service quote. Wanted to ask if you know of any third party companies that
> work on PlasmaTherm systems, specifically their DRIE tool?
>
> Thanks for any suggestions!
>
> *Fubo Rao, Ph.D.,*
> *Nanofabrication Cleanroom Manager,*
> *Center for Nanoscale Materials,*
> *Argonne National Laboratory*
> *9700 S. Cass Ave, Lemont, IL 60439*
>
> *Phone: 630-252-5708*
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>
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