[labnetwork] Drytek Dry Pumps

[Mark Weiler]

HI Dave,

As a follow-up and because I have had to employ our PS-80 once again, I decided to find out who can repair it, as I am never going to ADVACO again with any of our pumps.

I found that Trillium and FMG will service them.  FMG actually builds the pumps with permission of Hanbell (who owns the design).  They allow Drytek, FMG and Leybold (LV80) to use their design. 

So, essentially and FMG or Leybold pump is the same thing.   They are made be Hanbell.

Mark Weiler
Manager, Equipment & Facilities
Bertucci Nanotechnology Laboratory
Eden Hall Nanofabrication Cleanroom
Carnegie Mellon University
P:	412-268-2471
F:	412-268-3497
http://www.nanofab.ece.cmu.edu




> On Jul 29, 2022, at 10:40 AM, Hollingshead, Dave <hollingshead.19 at osu.edu> wrote:
> 
> Hi all,
>  
> Does anyone have experience (good, bad, or otherwise) with Drytek dry screw pumps (specifically as a turbo backing pump for an ICP etcher)? Most of the dry pumps in our lab are Edwards, but since lead times have recently become a major issue we are considering alternatives.
>  
> Thanks,
> -Dave
>  
> Dave Hollingshead 
> Manager of Research Operations – Nanotech West Lab
> The Ohio State University
> Suite 100, 1381 Kinnear Road, Columbus, OH 43212
> 614.292.1355 Office
> hollingshead.19 at osu.edu <mailto:hollingshead.19 at osu.edu> osu.edu <http://osu.edu/>
>  
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