[labnetwork] Treating silane exhaust from PECVD

[Kyle Keenan]

Hi Hadi,

We use a Mojave "point of use" dry scrubber. Since Mojave is out of
business, we have replacement cans and parts supplied by Jupiter
Scientific. We replace the can about every 3 years.

https://www.jupiterscientificinc.com/

Kyle

On Thu, Jan 12, 2023 at 4:17 PM Hadi Esmaeilsabzali <
hadi_esmaeilsabzali at sfu.ca> wrote:

> Dear Colleagues,
>
> For those who run PECVD at their facilities, I am wondering how you
> process the exhaust from your systems.
>
> We used to treat the PECVD exhaust along with that of the SiNx tube
> furnace through a TPU. We have recently decommissioned our furnace and TPU
> as they were too costly to run and are looking at alternative
> exhaust options for the PECVD only. We use our PECVD tool for oxide and
> nitride deposition, and it's worth noting that it only uses silane (no
> ammonia).
>
> Some colleagues had mentioned that they don't use a TPU/scrubber and send
> the process waste to the building exhaust (untreated). Given that our PECVD
> processes use a relatively small silane flow (~30 sccm for up to 30 mins
> per run each week - all max values) and it is significantly diluted, this
> sounded a practical option. I am trying to see if others have tried or
> can comment on this approach, particularly for a silane-based PECVD process.
> Aside from the flammability concerns, we are also aware of the
> potential oxide buildup in the exhaust system over time.
>
> I appreciate it if you share other (cost-effective) suggestions you might
> have for us!
>
> Thanks,
> Hadi
>
> *Hadi Esmaeilsabzali, PhD*
>
> Nanofabrication Group Manager, 4D LABS
>
> Simon Fraser University
>
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-- 
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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