[labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring

[Dennis Schweiger]

Aju,

good evening.  Here at the University of Michigan /LNF, the only breathing
air sensors we have are in spaces outside of the clean room.  All other
detection for HPM's is in the exhausted enclosures.  Our experience is that
we move too much air in the clean room to make local "air" sensors
effective to detect a leak, and to give us useful information.  Since all
of our process tools are loadlocked, we typically don't need to worry about
process gas exposure when cycling a tool, and we have a couple of hand held
detectors (SPMFlex) we can use to spot sample chambers when we open them.
In full disclosure, we have about 165 points of gas detection on our
system.  Some of them are Oxygen deprivation in our bulk LN2 users labs.
We use a variety of extractive tape (Honeywell Vertex) and electrochemical
(Honeywell Midas) sensors to protect the fab, and building.

Please let me know if you have any additional questions,

Dennis Schweiger
Facilities Manager
University of Michigan/LNF

734.647.2055 Ofc


On Fri, Jan 13, 2023 at 4:05 PM Aju Jugessur <Aju.Jugessur at colorado.edu>
wrote:

> Hi all,
>
>
>
> We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and
> Silane. The exhausts from the pumps are connected to a scrubber and ph
> neutralization/acid waste system.
>
>
>
> I am reaching out to get some advice on the specific locations of the
> Honeywell Midas sensors that we use, to detect any gas leak at the etchers
> and toxic gas monitoring system. We have sensors at the gas cabinets and
> ambient sensors at the tools.
>
> However, there seems to be a disagreement between our design team and our
> EHS unit. The design team recommends having the sensors in the gas pods,
> where the leaks are most likely to occur. EHS would like to have the
> ambient sensors at the tools, in the breathing zone areas. As per local
> code requirements, sensors in the gas pods satisfies the safety
> requirements.
>
>
>
> I would like to know what your set-up of the sensor locations for similar
> instruments is that you may have in your facility.
>
> Any insights based on experience will be super helpful.
>
>
>
> Thanks so much,
>
> Aju
>
>
>
>
>
> Aju Jugessur Ph.D. IEEE Sr. Member
>
> Director, Colorado Shared Instrumentation
>
> in Nanofabrication and Characterization (COSINC) Facility
>
> Member of Inclusive Culture Council (ICC)
>
> *University of Colorado Boulder | **College of Engineering & Applied
> Science*
>
> 4001 Discovery Drive, N360G SEEC *|* Boulder, CO 80303*|* *P:*
>  303.735.5019
>
> E-mail: aju.jugessur at colorado.edu
>
> Personal Zoom link: https://cuboulder.zoom.us/my/*ajugessur*
> <https://cuboulder.zoom.us/my/ajugessur>
>
> www.colorado.edu/facility/cosinc
>
> (MBA candidate, CU, Class of 2023)
>
>
>
> [image: signature_804197951]
>
>
>
>
> *Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever
> (CliftonStrengths)*
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