[labnetwork] Sensors for DES (diethylsilane)
Beaudoin, Mario
beaudoin at physics.ubc.ca
Fri Jan 20 16:19:17 EST 2023
Hello All,
We use DES (diethylsilane) as our silicon precursor in our Trion PECVD
system. The company we deal with for sensors is asking 10K$ for a
sensor that will need to recalibrated yearly and replaced after 2
years. Quite steep in our opinion. As our DES cylinder spends roughly
95% of the time closed, I'd like to find a less expensive option. For
example, even a handheld unit that I would only use when DES is in use.
Thanks all,
Mario
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