[labnetwork] 3rd party ASML support

Demis D. John demis at ucsb.edu
Tue Jan 31 18:05:52 EST 2023


Can anyone provide contact info for a 3rd party servicer for ASML tools
that are end-of-life?
(Asking for a colleague, not our own tool.)

Thanks,
-- Demis

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*     Process Group Manager*
 *UCSB Nanofabrication Facility* <https://www.nanotech.ucsb.edu/>
         Demis' Contact Info
<https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John>
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<https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab>
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