[labnetwork] 3rd party ASML support
Matthew Moneck
mmoneck at andrew.cmu.edu
Tue Jan 31 19:50:00 EST 2023
Hi Demis,
EO Technical Solutions has been servicing our ASML 5500/80 for a number of
years. They have been fantastic to work with.
https://eotechnical.com/service-and-training/
Best Regards,
Matt
--
*Matthew T. Moneck, Ph.D*
Executive Director, Claire & John Bertucci Nanotechnology Laboratory
Electrical & Computer Engineering | Carnegie Mellon University
5000 Forbes Avenue, Pittsburgh, PA 15213-3890
Phone: 412-268-5430
ece.cmu.edu <http://www.ece.cmu.edu/>
nanofab.ece.cmu.edu <http://www.nanofab.ece.cmu.edu/>
*From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Demis D.
John
*Sent:* Tuesday, January 31, 2023 6:06 PM
*To:* labnetwork <labnetwork at mtl.mit.edu>
*Subject:* [labnetwork] 3rd party ASML support
Can anyone provide contact info for a 3rd party servicer for ASML tools
that are end-of-life?
(Asking for a colleague, not our own tool.)
Thanks,
-- Demis
----------------------------------------
* Process Group Manager*
*UCSB Nanofabrication Facility* <https://www.nanotech.ucsb.edu/>
Demis' Contact Info
<https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John>
----------------------------------------
*Reminder*: The NanoFab has a publications policy
<https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab>
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