[labnetwork] Sparkles in the PECVD deposited amorphous silicon film

[Peter Lomax]

We add Argon to our recipe - can check the details if of interest.

Best

Peter

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Vibhor Kumar
Sent: 24 July 2023 18:12
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Sparkles in the PECVD deposited amorphous silicon film

This email was sent to you by someone outside the University.
You should only click on links or attachments if you are certain that the email is genuine and the content is safe.
Dear labnetwork community,
We are trying to deposit a-si (~100 nm) with plasmatherm PECVD. We are using 10% silane. Our recipe worked fine in the past. But this time we started looking some "sparkles" in the deposited film (image attached). We cleaned the chamber with freon gas, but still the situation is the same.

Any suggestion/s will be highly appreciated.

Sincerely,
-Vibhor Kumar-
Research Associate,
School of Engineering,
Rutgers, The State University of New Jersey, NJ
USA.
The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336. Is e buidheann carthannais a th' ann an Oilthigh Dh?n ?ideann, cl?raichte an Alba, ?ireamh cl?raidh SC005336.
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20230725/9db66cc1/attachment.html>