[labnetwork] Antireflective coating for Litho process

[Howard Northfield]

I use for i-line with SPR955 i-line optimized photoresist (pretty much only). I use i-line band pass filter plates during exposure. Shorter wavelength better for smaller dimensions.

Howard



________________________________
From: Bikash Dev Choudhury <d.c.bikash at iitb.ac.in>
Sent: Saturday, June 24, 2023 2:19 AM
To: Howard Northfield <Howard.Northfield at uottawa.ca>
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Antireflective coating for Litho process

Attention : courriel externe | external email

Thanks Howard!

Will check it.

Does it work only for i- line or for h- line as well?



On 2023-06-23 19:58, Howard Northfield wrote:


I use Brewer Science, XHRiC I-line Anti Reflective Coating.

See:
https://wiki.nanotech.ucsb.edu/wiki/images/3/33/XHRiC-Anti-Reflective-Coating.pdf

See also:
H. Northfield, O. Krupin, R. N. Tait, and P. Berini, "Tri-layer contact photolithography process for high-resolution lift-off," Microelectron. Eng. 241 (2021).


Howard Northfield
Research Associate
Advanced Research Complex (ARC)
University of Ottawa


________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Bikash Dev Choudhury <d.c.bikash at iitb.ac.in>
Sent: Friday, June 23, 2023 5:26 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Antireflective coating for Litho process

Attention : courriel externe | external email

Dear Labnetwork,

I am looking for antireflective coating for both top and bottom layer in photolitho process.

Looking forward for any lead/info.

Thanks in advance!

--
Best Regards
Dr. Bikash Dev Choudhury
Sr. Process Technologist
CEN, IITBNF
Electrical Engineering Department
IIT Bombay, Mumbai-400076
Mobile No. 7400319871
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