[labnetwork] Antireflective coating for Litho process

[Bikash Dev Choudhury]

Thanks Howard!

Will check it.

Does it work only for i- line or for h- line as well?

On 2023-06-23 19:58, Howard Northfield wrote:

> I use Brewer Science, XHRiC I-line Anti Reflective Coating.
> 
> See:
> https://wiki.nanotech.ucsb.edu/wiki/images/3/33/XHRiC-Anti-Reflective-Coating.pdf
> 
> See also:
> H. Northfield, O. Krupin, R. N. Tait, and P. Berini, "Tri-layer contact 
> photolithography process for high-resolution lift-off," Microelectron. 
> Eng. 241 (2021).
> 
> Howard Northfield
> Research Associate
> Advanced Research Complex (ARC) University of Ottawa
> 
> -------------------------
> 
> From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Bikash 
> Dev Choudhury <d.c.bikash at iitb.ac.in>
> Sent: Friday, June 23, 2023 5:26 AM
> To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
> Subject: [labnetwork] Antireflective coating for Litho process
> 
> Attention : courriel externe | external email
> 
> Dear Labnetwork,
> 
> I am looking for antireflective coating for both top and bottom layer 
> in photolitho process.
> 
> Looking forward for any lead/info.
> 
> Thanks in advance!
> 
> --
> Best Regards
> Dr. Bikash Dev Choudhury
> Sr. Process Technologist
> CEN, IITBNF
> Electrical Engineering Department
> IIT Bombay, Mumbai-400076
> Mobile No. 7400319871

--
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20230624/8a7c87c7/attachment.html>