[labnetwork] Dry Bed Scrubber for silane, etc

[James C. Sturm]

We have a Si/Ge UHV CVD system for which we want to purchase a dedicated dry bed scrubber.

Total N2 purges ~38 lpm (from several dry pumps, etc)
Total H2 100 sccm when purging, but normally < 20 sccm
Silane ~2 sccm, Germane <  0.05 sccm,  Diborane and phosphine < 0.01 sccm.
Running < 10 hours a week on average.

We are looking into a Callisto dry bed scrubber (by Jupiter).    We have no experience with such systems, having used a hot "combustion chamber" with air pumped in for 20+ years.

Comments/suggestions/other manufacturers/"been there done that" are welcome.
Thanks,
Jim Sturm and Zoe Cyue, Princeton University

********************************************
Prof. James C. Sturm
     Chair, Department of Electrical and Computer Engineering
     Stephen R. Forrest Professor in Electrical Engineering
     Princeton University
     B210 E-Quad, Olden St.
     Princeton, NJ  08540
     609-258-5610, fax:  609-258-1177
     sturm at princeton.edu<mailto:sturm at princeton.edu>

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