[labnetwork] Dry Bed Scrubber for silane, etc

[Collins, Deon]

Contact Critical Systems Inc. or BAZM. They both have these systems. CS Clean Solutions also offers dry bed systems.

Deon D. Collins

FACILITY MANAGER
Holonyak Lab
University of Illinois at Urbana-Champaign
208 N Wright St Rm. 248 | 2250
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>


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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of James C. Sturm
Sent: Friday, March 24, 2023 9:49 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Dry Bed Scrubber for silane, etc

We have a Si/Ge UHV CVD system for which we want to purchase a dedicated dry bed scrubber.

Total N2 purges ~38 lpm (from several dry pumps, etc)
Total H2 100 sccm when purging, but normally < 20 sccm
Silane ~2 sccm, Germane <  0.05 sccm,  Diborane and phosphine < 0.01 sccm.
Running < 10 hours a week on average.

We are looking into a Callisto dry bed scrubber (by Jupiter).    We have no experience with such systems, having used a hot "combustion chamber" with air pumped in for 20+ years.

Comments/suggestions/other manufacturers/"been there done that" are welcome.
Thanks,
Jim Sturm and Zoe Cyue, Princeton University

********************************************
Prof. James C. Sturm
     Chair, Department of Electrical and Computer Engineering
     Stephen R. Forrest Professor in Electrical Engineering
     Princeton University
     B210 E-Quad, Olden St.
     Princeton, NJ  08540
     609-258-5610, fax:  609-258-1177
     sturm at princeton.edu<mailto:sturm at princeton.edu>

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