[labnetwork] Dry Bed Scrubber for silane, etc

[Paolini, Steven]

James,
   I would highly recommend a dry bed scrubber for a number of reasons.
Electrical consumption will be seriously reduced since you are not keeping a large mass of "burn box" at elevated temperatures.
If your present unit is of the "burn/wash" type, city water consumption will be eliminated.
I have installed a dual Calisto system for our LPCVD systems and I am quite satisfied with it's performance and features. One outstanding feature is the built in TGMS sensor that will alert you to when the dry bed has reached its lifespan. Most other abatement systems simply monitor exhaust pressure as a trouble indicator. The dual Calisto will not only alert you of a dry bed (cannister) failure, it will automatically switch over to the second canister and you have the luxury of changing the spent one when you have the time.
   Hope this helps,
    Equipment Dood.

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of James C. Sturm
Sent: Friday, March 24, 2023 10:49 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Dry Bed Scrubber for silane, etc

We have a Si/Ge UHV CVD system for which we want to purchase a dedicated dry bed scrubber.

Total N2 purges ~38 lpm (from several dry pumps, etc)
Total H2 100 sccm when purging, but normally < 20 sccm
Silane ~2 sccm, Germane <  0.05 sccm,  Diborane and phosphine < 0.01 sccm.
Running < 10 hours a week on average.

We are looking into a Callisto dry bed scrubber (by Jupiter).    We have no experience with such systems, having used a hot "combustion chamber" with air pumped in for 20+ years.

Comments/suggestions/other manufacturers/"been there done that" are welcome.
Thanks,
Jim Sturm and Zoe Cyue, Princeton University

********************************************
Prof. James C. Sturm
     Chair, Department of Electrical and Computer Engineering
     Stephen R. Forrest Professor in Electrical Engineering
     Princeton University
     B210 E-Quad, Olden St.
     Princeton, NJ  08540
     609-258-5610, fax:  609-258-1177
     sturm at princeton.edu<mailto:sturm at princeton.edu>

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