[labnetwork] Name that tool

[Robert J Bicchieri]

Hi,
It’s a Lam Autoetch 490 plasma etch (because of Chlorine)

Regards,
Bob


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Robert J. Bicchieri

Research Specialist

Massachusetts Institute of Technology

MIT. Nano

60 Vassar St. Bldg. 12-5007

Cambridge, MA 02139


From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Craig Cheney
Sent: Wednesday, November 8, 2023 11:23 AM
To: Jim Mitchell <jimm at science.xyz>; Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Name that tool

Lam Research 580/590 plasma etch tool.   Spent many years working on them many many years ago.

Thank you,

Craig Cheney
Owner, President
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From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Jim Mitchell
Sent: Wednesday, November 8, 2023 5:41 AM
To: Lab Network (labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>) <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Name that tool

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