[labnetwork] Sputtering TaP

[Chang, Long]

Hello,

Is anyone aware of any problems sputtering Tantalum Phosphide (TaP)? I couldn’t find much information about it on the internet.

Thanks,
Long Chang
UH Nanofabrication Facility
Houston, TX
lvchang at central.uh.edu<mailto:lvchang at central.uh.edu>




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