[labnetwork] Resist developer etching time for ALD films
Dilek Cakiroglu (Alumni)
dcakiroglu at alumni.sabanciuniv.edu
Sun Nov 12 10:57:59 EST 2023
Hi ,
Does anyone have experience with resist developer etching time for ALD
films? My primary interest is Al2O3, SiO2, HfO2 and SiN ALD films.
Regards,
Dilek
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