[labnetwork] Unaxis/Plasma Therm Shuttlelock SLR 700 Metal Etcher

[Jim Pierce]

Dear All,
I hope you are all doing well.

We are searching for a maintenance manual or exploded view of mechanical drawings for the chuck and lift pin assembly. If this is something you could share, we'd be extremely grateful.

We have a facilities and user manual and some electrical schematics.


Best regards,

Jim


[cid:f427d158-7b9b-4fe4-9446-cfffc7d07ed8]



Jim Pierce

NanoFab Staff Process Engineer

University of Utah

36 S. Wasatch Drive, Rm 2528

Salt Lake City, Utah 84112

Office - 801-587-1219

Cell - 385-227-3294

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