[labnetwork] Unaxis/Plasma Therm Shuttlelock SLR 700 Metal Etcher

[Collins, Deon]

The chuck and lift pin assembly for what piece of equipment?

Deon D. Collins

FACILITY MANAGER
The Grainger College Of Engineering UIUC
Holonyak Micro & Nanotechnology Lab
208 N Wright St Rm. 1114 | MC-249
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>


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Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.

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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Jim Pierce
Sent: Monday, November 20, 2023 10:45 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Unaxis/Plasma Therm Shuttlelock SLR 700 Metal Etcher

Dear All,
I hope you are all doing well.

We are searching for a maintenance manual or exploded view of mechanical drawings for the chuck and lift pin assembly. If this is something you could share, we'd be extremely grateful.

We have a facilities and user manual and some electrical schematics.


Best regards,

Jim


[cid:image002.png at 01DA1C6A.777701D0]



Jim Pierce

NanoFab Staff Process Engineer

University of Utah

36 S. Wasatch Drive, Rm 2528

Salt Lake City, Utah 84112

Office - 801-587-1219

Cell - 385-227-3294

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