[labnetwork] ICP-RIE Purchase

[Jeffrey Salzmann]

Christophe,

I have had nothing but issues with Trion for RIEs, and these issues are not limited to my facility. I would avoid them.

Regards,
Jeff


Jeff Salzmann
Assistant Professor of Research
Cleanroom Manager, Shared Instrumentation Laboratories
School of Engineering and Applied Sciences
University at Buffalo
114A Davis Hall
Buffalo, NY 14260



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Christophe Clément
Sent: Tuesday, November 21, 2023 2:26 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] ICP-RIE Purchase

Hello community,

I need your input regarding the purchase of a new ICP-RIE. We currently have two Oxford systems, Plasmalab System100. We're quite happy with them (the service could be better though), so we've asked Oxford to quote us for an ICP-RIE, the Cobra model. This system will be dedicated for Silicon Bosch process only.
However, we wouldn't want to miss out on other tools that might satisfy us. Apart from Plasma Therm, whom I intend to contact shortly, do you know of any other suppliers of this type of equipment? As our cleanroom space is limited, equipment the size of a Plasmalab would be ideal.

Also, regarding wafer cooling, we currently use liquid nitrogen only, although we haven't been doing cryo processes for a long time, but we don't want to eliminate this option at this time for the new tool. I've been proposed to use a chiller and LN2 combo, to save LN2 when not using cryo processes.
I'd be interested to hear what you think of this choice (cooling time, maintenance...)

Thank you
Best
Christophe


Christophe Clément
Technicien laboratoire
Laboratoire de microfabrication (LMF)
Groupe des Couches Minces (GCM) www.gcmlab.ca<http://www.gcmlab.ca/>
Ecole Polytechnique de Montréal www.polymtl.ca<http://www.polymtl.ca/>
Département de génie physique
* 2900 Boulevard Edouard Monpetit
Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4

* christophe.clement at polymtl.ca<mailto:christophe.clement at polymtl.ca>
* 514 340 4711 #2417
Fax : 514 340 5195


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