[labnetwork] ICP-RIE Purchase

[Nathan Nelson - Fitzpatrick]

Hi Christophe,

Regarding your second question.  Our lab has the LN2-chiller switchover capabilities on both of our 10+ year old Oxford Plasmalab 100 DRIE systems.

In practice we have used the chillers 99+% of the time and only switched over to LN2 on rare occasions.  We have not observed any reliability issues with the changeover hardware or process, but it is seldom exercised.  If I recall correctly, the changeover takes about 45 minutes and it’s a process that might require service level permissions.  In any case we have it locked out of the user accounts on our tools.  Some of these observations may be different from how this is handled on a modern Oxford ICP-RIE though since the PLCs and software have undergone many changes since our systems were commissioned.

Hope this helps,
  -Nathan

--
Nathan Nelson-Fitzpatrick  PhD, PEng   (He/Him)
Director, Quantum-Nano Fabrication and Characterization Facility (QNFCF)
Office of Research
University of Waterloo
200 University Avenue West, Waterloo, ON  N2L 3G1
P: 519-888-4567 ext. 31796
C: 226-218-3206
https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/

[signature_3157769220]

From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Christophe Clément <christophe.clement at polymtl.ca>
Date: Tuesday, November 21, 2023 at 4:13 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] ICP-RIE Purchase
Hello community,

I need your input regarding the purchase of a new ICP-RIE. We currently have two Oxford systems, Plasmalab System100. We're quite happy with them (the service could be better though), so we've asked Oxford to quote us for an ICP-RIE, the Cobra model. This system will be dedicated for Silicon Bosch process only.
However, we wouldn't want to miss out on other tools that might satisfy us. Apart from Plasma Therm, whom I intend to contact shortly, do you know of any other suppliers of this type of equipment? As our cleanroom space is limited, equipment the size of a Plasmalab would be ideal.

Also, regarding wafer cooling, we currently use liquid nitrogen only, although we haven't been doing cryo processes for a long time, but we don't want to eliminate this option at this time for the new tool. I've been proposed to use a chiller and LN2 combo, to save LN2 when not using cryo processes.
I'd be interested to hear what you think of this choice (cooling time, maintenance…)

Thank you
Best
Christophe


Christophe Clément
Technicien laboratoire
Laboratoire de microfabrication (LMF)
Groupe des Couches Minces (GCM) www.gcmlab.ca<http://www.gcmlab.ca/>
Ecole Polytechnique de Montréal www.polymtl.ca<http://www.polymtl.ca/>
Département de génie physique
• 2900 Boulevard Edouard Monpetit
Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4

• christophe.clement at polymtl.ca<mailto:christophe.clement at polymtl.ca>
• 514 340 4711 #2417
Fax : 514 340 5195


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