[labnetwork] Gas cabinets for Ammonia and 2-5% Silane

[David Wolff]

See if http://www.appliedenergysystems.com/  has what you need

David Wolff
Industrial Sales Director - North America

Nel Hydrogen
10 Technology Drive,  Wallingford, CT 06492 United States
Office:    M  +1 860-604-3282
Fax: +1 203-949-8016
dwolff at nelhydrogen.com


-----Original Message-----
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Kevin M McPeak
Sent: Tuesday, November 21, 2023 17:54
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Gas cabinets for Ammonia and 2-5% Silane

CAUTION: Our automatic validation of the sender of this mail failed. Pay extra attention to attachments as well as links!!

Dear Colleagues,

The LSU Nanofab will install an Oxford PECVD system for SiO2, SiNx, and a-Si deposition next year. We are getting quotes for ammonia and silane gas cabinets in preparation for the PECVD.

So far, we have received quotes for Ammonia and Silane gas cabinets from SDC, SilPac, Matherson, AirGas, and Critical Systems.

Are we missing anyone? We have discussed the details of the installation with our local safety folk but input from the list of recommended gas cabinet manufacturers would be most appreciated. We are especially interested in reconditioned systems if they exist. Thanks!

Regards,
Kevin

--
Kevin M. McPeak
Associate Professor | LSU Dept. of Chemical Engineering
225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication _______________________________________________
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