[labnetwork] Gas cabinets for Ammonia and 2-5% Silane

[SOULET, Axel]

Error of typo in the email address : ronald.inman at airliquide.com
Expert  in dispense systems : sublimation systems, organometallic dispense
systems, with reference at Intel, Applied Materials, ...

On Thu, Nov 23, 2023 at 9:18 AM SOULET, Axel <axel.soulet at airliquide.com>
wrote:

> Air Liquide Electronics Systems
> Ask to ron.inman at airliquide.com
>
> On Wed, Nov 22, 2023 at 6:29 PM Kyle Keenan <kckeenan at seas.upenn.edu>
> wrote:
>
>> Applied Energy Systems:
>>
>> https://www.appliedenergysystems.com/
>>
>> On Wed, Nov 22, 2023 at 8:19 AM Kevin M McPeak <kmcpeak at lsu.edu> wrote:
>>
>>> Dear Colleagues,
>>>
>>> The LSU Nanofab will install an Oxford PECVD system for SiO2, SiNx, and
>>> a-Si deposition next year. We are getting quotes for ammonia and silane gas
>>> cabinets in preparation for the PECVD.
>>>
>>> So far, we have received quotes for Ammonia and Silane gas cabinets from
>>> SDC, SilPac, Matherson, AirGas, and Critical Systems.
>>>
>>> Are we missing anyone? We have discussed the details of the installation
>>> with our local safety folk but input from the list of recommended gas
>>> cabinet manufacturers would be most appreciated. We are especially
>>> interested in reconditioned systems if they exist. Thanks!
>>>
>>> Regards,
>>> Kevin
>>>
>>> --
>>> Kevin M. McPeak
>>> Associate Professor | LSU Dept. of Chemical Engineering
>>> 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication
>>> _______________________________________________
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>>>
>>
>>
>> --
>> Kyle Keenan
>>
>> Senior Manager - Laboratory Operations
>> Quattrone Nanofabrication Facility
>> University of Pennsylvania
>> P: 215-898-7560
>> F: 215-573-4925
>> _______________________________________________
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>>
>
>
> --
>
> *Axel Soulet, PhD / *+33 (0)6 08 85 83 86 / Air Liquide / *France*
>
>

-- 

*Axel Soulet, PhD / *+33 (0)6 08 85 83 86 / Air Liquide / *France*
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