[labnetwork] [EXTERNAL] Re: Gas cabinets for Ammonia and 2-5% Silane

[April, Mark R.]

Hi, I have several sdc systems online for years at Draper they work great and the software is very user friendly.   Great support also
Thanks
Mark April

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________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Kyle Keenan <kckeenan at seas.upenn.edu>
Sent: Wednesday, November 22, 2023 8:23:46 AM
To: Kevin M McPeak <kmcpeak at lsu.edu>
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [EXTERNAL] Re: [labnetwork] Gas cabinets for Ammonia and 2-5% Silane

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Applied Energy Systems:

https://www.appliedenergysystems.com/<https://urldefense.us/v2/url?u=https-3A__www.appliedenergysystems.com_&d=DwMFaQ&c=m5mye7XjY-PNBUdjUS9G7n0DDGwujM2TWPAftzw2VTE&r=8o6r6wkKqpakJIqrCmOGhsWqm8hHsPgUuiCbZ5HVQzk&m=RbocpmtlOOnOJnQY2x77IdoqHEa_ZzHZkoKoptWGzQtGeVzhhX_9mDtbVjR_beQd&s=rPg6ItQl9cUI68Ls3hDGQRBtLXNJbtE5IA9LUd0kgsg&e=>

On Wed, Nov 22, 2023 at 8:19 AM Kevin M McPeak <kmcpeak at lsu.edu<mailto:kmcpeak at lsu.edu>> wrote:
Dear Colleagues,

The LSU Nanofab will install an Oxford PECVD system for SiO2, SiNx, and a-Si deposition next year. We are getting quotes for ammonia and silane gas cabinets in preparation for the PECVD.

So far, we have received quotes for Ammonia and Silane gas cabinets from SDC, SilPac, Matherson, AirGas, and Critical Systems.

Are we missing anyone? We have discussed the details of the installation with our local safety folk but input from the list of recommended gas cabinet manufacturers would be most appreciated. We are especially interested in reconditioned systems if they exist. Thanks!

Regards,
Kevin

--
Kevin M. McPeak
Associate Professor | LSU Dept. of Chemical Engineering
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--
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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