[labnetwork] Gas cabinets for Ammonia and 2-5% Silane

[Jing Guo]

Hi Kevin, 


Have you tried AES (https://www.appliedenergysystems.com/). We have all gas cabinets and VMBs, gas control panels from them. If you need the contact from AES, I could share later. 

Best,
Jing
---------------------------------------
Jing Guo Ph.D.
Research Scientist
SEA Cleanroom (SST 017)
Rice University
Houston, TX 
jeanne.guo at rice.edu
713-348-8227







> On Nov 21, 2023, at 4:54 PM, Kevin M McPeak <kmcpeak at lsu.edu> wrote:
> 
> Dear Colleagues,
> 
> The LSU Nanofab will install an Oxford PECVD system for SiO2, SiNx, and a-Si deposition next year. We are getting quotes for ammonia and silane gas cabinets in preparation for the PECVD.
> 
> So far, we have received quotes for Ammonia and Silane gas cabinets from SDC, SilPac, Matherson, AirGas, and Critical Systems.
> 
> Are we missing anyone? We have discussed the details of the installation with our local safety folk but input from the list of recommended gas cabinet manufacturers would be most appreciated. We are especially interested in reconditioned systems if they exist. Thanks!
> 
> Regards,
> Kevin
> 
> --
> Kevin M. McPeak
> Associate Professor | LSU Dept. of Chemical Engineering
> 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication
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